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Authors: S Kylychbekov, H S Song, K B Kwon, O Ra, E S Yoon, M Chung, K Yu, S R Yoffe, B Ersfeld, D A Jaroszynski, M S Hur
Journal title: Plasma Sources Science and Technology
Journal number: 29/2
Journal publisher: IOP Publishing
Published year: 2020
Published pages: 025018
DOI identifier: 10.1088/1361-6595/ab6756
ISSN: 1361-6595