Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma

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Authors: A. Megía-Macías, O. D. Cortázar, O. Tarvainen, H. Koivisto

Journal title: Physics of Plasmas

Journal number: 24/11

Journal publisher: American Institute of Physics

Published year: 2017

Published pages: 113501

DOI identifier: 10.1063/1.5001488

ISSN: 1070-664X