Electron cyclotron resonance ion source plasma characterization by energy dispersive x-ray imaging

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Authors: R Rácz, D Mascali, S Biri, C Caliri, G Castro, A Galatà, S Gammino, L Neri, J Pálinkás, F P Romano, G Torrisi

Journal title: Plasma Sources Science and Technology

Journal number: 26/7

Journal publisher: IOP Publishing

Published year: 2017

Published pages: 075011

DOI identifier: 10.1088/1361-6595/aa758f

ISSN: 1361-6595