Lattice sites of ion-implanted Mn, Fe and Ni in 6H-SiC

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Authors: A R G Costa, U Wahl, J G Correia, E David-Bosne, L M Amorim, V Augustyns, D J Silva, M R da Silva, L M C Pereira

Journal title: Semiconductor Science and Technology

Journal number: 33/1

Journal publisher: Institute of Physics Publishing

Published year: 2018

Published pages: 015021

DOI identifier: 10.1088/1361-6641/aa9f08

ISSN: 0268-1242