New Approach for Monitoring a Direct Laser Interference Patterning Process Using a Combination of an Infrared Camera and a Diffraction Measurement System

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Authors: Nikolai Schröder, Sascha Teutoburg-Weiss, Germán Vergara, Andrés Fabián Lasagni

Journal title: JLMN-Journal of Laser Micro/Nanoengineering

Journal number: Vol. 16, No. 2

Journal publisher: Japan Laser Processing

Published year: 2021

DOI identifier: 10.2961/jlmn.2021.02.2009

ISSN: 1880-0688