MFIG — A Mass Filtered Ion Gauge

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Authors: Herman Bekman , Jurjen Emmelkamp, Youyou Westland, Dorus Elstgeest, Thomas Mechielsen, Michael Haye, Freek Molkenboer, Norbert Koster, Henk Lensen

Journal title: e-Journal of Surface Science and Nanotechnology

Journal publisher: Surface Science Society of Japan

Published year: 2023

DOI identifier: 10.1380/ejssnt.2023-059

ISSN: 1348-0391