An optical system and image processing tool for predicting PIN malfunctioning in growth Chambers of semiconductors

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Authors: U. Amato (CNR), A. Antoniadis (CNR), D.Fazio (ST-I), C. Genua (ST-I), D. Granata (CNR), A. Lamagna (CNR), D. Pagano (ST-I), G. Tochino (ST-I), P. Vasquez (ST-I)

Journal title: Sensors

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2022

ISSN: 1424-8220