Prediction of Yield in semiconductor production from defects optically detected on the Wafers

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Authors: U. Amato (CNR), A. Antoniadis (CNR), A. Doinychko (Mentor), A. Lamagna (CNR), D. Pagano (ST-I), F. Piccinini (ST-I), E. Selvan (CNR), C. Severgnini (ST-I), A. Torres (Mentor), P. Vasquez (ST-I)

Journal title: ASMBI - Applied Stochastic Models in Business and Industry (formerly Applied Stochastic Models and Data Analysis)

Journal publisher: John Wiley & Sons Inc.

Published year: 2022

ISSN: 1524-1904