Real-time defect detection through lateral monitoring of secondary process emissions during ultrashort pulse laser microstructuring

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Authors: Milena Zuric, Andreas Brenner

Journal title: Optical Engineering

Journal number: 61/9

Journal publisher: S P I E - International Society for Optical Engineering

Published year: 2022

DOI identifier: 10.1117/1.oe.61.9.094101

ISSN: 0091-3286