Real-time defect detection throughlateral monitoring of secondaryprocess emissions during ultrashortpulse laser microstructuring

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Authors: Milena Zuric, Andreas Brenner

Journal title: Proceedings, Laser-based Micro- and Nanoprocessing

Journal number: 11989

Journal publisher: S P I E - International Society for Optical Engineering

Published year: 2022

DOI identifier: 10.1117/12.2607267