Multi-Beam Processing with Individually Addressable Beamlets:Calibration & Data Processing

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Authors: Alexander Meyer, Milena Zuric

Journal title: JLMN-Journal of Laser Micro/Nanoengineering

Journal number: 16/2

Journal publisher: Japan Laser Processing

Published year: 2021

DOI identifier: 10.2961/jlmn.2021.02.2005

ISSN: 1880-0688