Influence of process parameters on energetic properties of sputter-deposited Al/CuO reactive multilayers

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Authors: Vidushi Singh; Baptiste Julien; Ludovic Salvagnac; Sylvain Pelloquin; Teresa Hungria; Claudie Josse; Mohamed Belhaj; Carole Rossi

Journal title: Nanotechnology

Journal number: 12

Journal publisher: Institute of Physics Publishing

Published year: 2022

Published pages: 465704

DOI identifier: 10.1088/1361-6528/ac85c5

ISSN: 0957-4484