Structure and Crystallographic Properties of Multi-Material Coatings Deposited in a Combinatorial Sputter Plant Compared to Simulations from the Machine Level to Microstructure

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Authors: David Böhm, T. Schrefl, A. Eder, C. Eisenmenger-Sittner

Journal title: ICMCTF2023

Journal number: 2023

Journal publisher: ICMCTF 2023

Published year: 2023