TEM Characterization of Long Term Aged Interconnect Oxide Layers from Real Stack

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Authors: Stéphane Poitel; Samaneh Daviran; Manuel Bianco; Christian Walter; Kai Herbrig; Jan Van herle

Journal title: ECS Transaction

Journal number: 103 (1) 2021

Journal publisher: Electrochemical Society, Inc.

Published year: 2021

Published pages: 1283-1300

DOI identifier: 10.1149/10301.1283ecst

ISSN: 1938-5862