High precision optical filter based on magnetron sputtering

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Authors: Jens-Peter Biethan, Detlef Arhilger, Jürgen Pistner, Holger Reus, Martin Stapp, Harro Hagedorn

Journal title: Vakuum in Forschung und Praxis

Journal number: 29/4

Journal publisher: John Wiley & Sons Ltd.

Published year: 2017

Published pages: 26-31

DOI identifier: 10.1002/vipr.201700654

ISSN: 0947-076X