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Authors: Thesberg, M., Schanovsky, F., Stanojevic, Z., Baumgartner, O. and Karner, M.
Journal title: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
Journal number: 2023
Journal publisher: IEEE
Published year: 2023
DOI identifier: 10.23919/sispad57422.2023.10319645
ISBN: 978-4-86348-803-8