Advanced contacts on 3D nanostructured channels for vertical transport gate-all-around transistors

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Authors: Guilhem Larrieu, Jonas Müller, Sylvain Pelloquin, Abhishek Kumar, Konstantinos Moustakas, Pawel Michalowski, Aurelie Lecestre

Journal title: 21st International Workshop on Junction Technology (IWJT)

Journal number: 23 juin

Journal publisher: IEEE

Published year: 2023

DOI identifier: 10.23919/iwjt59028.2023.10175172

ISBN: 978-4-86348-807-6