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Authors: B. Neckel Wesling, M. Deng, C. Mukherjee, A. Kumar, G. Larrieu, et al.
Journal title: 8th Joint International EuroSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI−ULIS) 2022, May
Journal number: mai 22
Journal publisher: Elsevier
Published year: 2022
DOI identifier: 10.1016/j.sse.2022.108359