Effect of the Deposition Conditions on Titanium Oxide Thin Films Properties

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Authors: M. Pustan, C. Birleanu, A. Trif, S. Garabagiu, D. Marconi, L. Barbu-Tudoran

Journal title: 2018 International Semiconductor Conference (CAS)

Journal publisher: IEEE

Published year: 2018

Published pages: 83-86

DOI identifier: 10.1109/smicnd.2018.8539738

ISBN: 978-1-5386-4482-9