High precision interferometric analysis of sub-micrometers spin-coated polymer films.

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Authors: Meshalkin, A.; Abashkin, V.; Prisacar, A.; Triduh, G.; Andries, I.; Bets, L.; Achimova, E.

Journal title: Sensor Electronics and Microsystem Technologies

Journal number: 18157459

Journal publisher: Odessa I. I. Mechnikov National University

Published year: 2014

Published pages: p. 62-69

ISSN: 1815-7459