Summary
This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.
Authors: Jiří Liška, Filip Ligmajer, Pedro V. Pinho N., Lukáš Kejík, Michal Kvapil, Petr Dvořák, Michal Horký, Nikolaus S. Leitner, Erik Reimhult, Tomáš Šikola
Journal title: Microelectronic Engineering
Journal number: 228
Journal publisher: Elsevier BV
Published year: 2020
Published pages: 111326
DOI identifier: 10.1016/j.mee.2020.111326
ISSN: 0167-9317