Optical functions of silicon from reflectance and ellipsometry on silicon-on-insulator and homoepitaxial samples

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Authors: J. Humlíček, J. Šik

Journal title: Journal of Applied Physics

Journal number: 00218979

Journal publisher: American Institute of Physics

Published year: 2015

Published pages: 195706

DOI identifier: 10.1063/1.4936126

ISSN: 0021-8979