(Invited) Three-Dimensional Epitaxial Si1-XGex, Ge and SiC Crystals on Deeply Patterned Si Substrates

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Authors: H. von Kanel, F. Isa, C. V. Falub, E. J. Barthazy, E. Muller Gubler, D. Chrastina, G. Isella, T. Kreiliger, A. G. Taboada, M. Meduna, R. Kaufmann, A. Neels, A. Dommann, P. Niedermann, F. Mancarella, M. Mauceri, M. Puglisi, D. Crippa, F. La Via, R. Anzalone, N. Piluso, R. Bergamaschini, A. Marzegalli, L. Miglio

Journal title: ECS Transactions

Journal number: 19385862

Journal publisher: Electrochemical Society, Inc.

Published year: 2014

Published pages: 631-648

DOI identifier: 10.1149/06406.0631ecst

ISSN: 1938-5862