Microdevices for Cell Stimulation: Integrated Zinc Oxide Piezoelectric Nanostructures in Silicon Microparticles

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Authors: Laura Lefaix, Andreu Blanquer, Lucie Bacakova, Jaume Esteve, Gonzalo Murillo

Journal title: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/mems51782.2021.9375134