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Authors: I. Stambolova, V. Blaskov, N. Kaneva, M. Shipochka, S. Vassilev, O. Dimitrov, A. Eliyas
Journal title: Materials Science in Semiconductor Processing
Journal number: 25
Journal publisher: Pergamon Press
Published year: 2014
Published pages: 244-250
DOI identifier: 10.1016/j.mssp.2013.12.020
ISSN: 1369-8001