Summary
This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.
Authors: L. Wang, C. Lazarou, C. Anastassiou, G. E. Georghiou, C. Leys, and A. Nikiforov
Journal title: Plasma Sources Science and Technology
Journal number: vol. 30, no. 7
Journal publisher: Institute of Physics Publishing
Published year: 2021
Published pages: 075029
DOI identifier: 10.1088/1361-6595/ac12c0
ISSN: 0963-0252