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Authors: D. P. Singh, K. M. Dorney, F. Holzmeier, E. W. Larsen, L. Galleni, C. Mokhtarzadeh, M. J. van Setten, T. Conard, J. S. Petersen, P. A. W. van der Heide
Journal title: Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII
Journal number: 12955, 2024
Journal publisher: SPIE
Published year: 2024
Published pages: 1295504
DOI identifier: 10.1117/12.3010751
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