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Authors: Kevin M. Dorney, Nicola N. Kissoon, Fabian Holzmeier, Esben W. Larsen, Dhirendra P. Singh, Shikhar Arvind, Sayantani Santra, Roberto Fallica, Igor Makhotkin, Vicky Philipsen, Stefan De Gendt, Claudia Fleischmann, Paul A. W. van der Heide, John S. Petersen
Journal title: Proceedings of SPIE, Volume 12494, Optical and EUV Nanolithography XXXVI
Journal number: 12494, 2023
Journal publisher: SPIE
Published year: 2023
Published pages: 1249407
DOI identifier: 10.1117/12.2658359
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