IMPLEMENTING A NEW GENETIC ALGORITHM TO SOLVE THE CAPACITY ALLOCATION PROBLEM IN THE PHOTOLITHOGRAPHY AREA

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Authors: Amir Ghasemi, Cathal Heavey, Kamil Erkan Kabak

Journal title: 2018 Winter Simulation Conference (WSC)

Journal publisher: IEEE

Published year: 2018

Published pages: 3696-3707

DOI identifier: 10.1109/wsc.2018.8632204

ISBN:978-1-5386-6572-5