Very-high-frequency probes for atomic force microscopy with silicon optomechanics

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: L. Schwab; P. E. Allain; N. Mauran; X. Dollat; L. Mazenq; D. Lagrange; M. Gély; S. Hentz; G. Jourdan; I. Favero; B. Legrand

Journal title: Microsystems & Nanoengineering 8 (1), 32

Journal number: 5

Journal publisher: Springer Nature

Published year: 2022

DOI identifier: 10.1038/s41378-022-00364-4

ISSN: 2055-7434