Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials

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Authors: Faegheh S. Sajjadian; Laura Galleni; Kevin M. Dorney; Dhirendra P. Singh; Fabian Holzmeier; Michiel J. van Setten; Stefan De Gendt; Thierry Conard

Journal title: J. Vac. Sci. Technol. A

Journal number: 41, 2023

Journal publisher: American Institute of Physics

Published year: 2023

Published pages: 53206

DOI identifier: 10.1116/6.0002808

ISSN: 0734-2101