Improved Endurance of Ferroelectric HfxZr1-xO2 Integrated on InAs Using Millisecond Annealing

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Authors: R. Athle, T. Blom, A. Irish, A. Persson, L.-E. Wernersson, R. Timm, M. Borg

Journal title: Advanced materials interfaces

Journal number: 9

Journal publisher: wiley

Published year: 2022

Published pages: 2201038

DOI identifier: 10.1002/admi.202201038

ISSN: 2196-7350