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Authors: Annemie Bogaerts, Erik C. Neyts, Olivier Guaitella, Anthony B. Murphy
Journal title: Plasma Sources Science and Technology
Journal number: 31
Journal publisher: Institute of Physics Publishing
Published year: 2022
Published pages: 053002
DOI identifier: 10.1088/1361-6595/ac5f8e
ISSN: 0963-0252
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