Highly ${ }^{28} \mathrm{Si}$ Enriched Silicon by Localised Focused Ion Beam Implantation

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Authors: Acharya, Ravi; Coke, Maddison; Adshead, Mason; Li, Kexue; Achinuq, Barat; Cai, Rongsheng; Gholizadeh, A. Baset; Jacobs, Janet; Boland, Jessica L.; Haigh, Sarah J.; Moore, Katie L.; Jamieson, David N.; Curry, Richard J.

Journal title: Communications Materials

Journal number: 5

Journal publisher: Nature

Published year: 2024

Published pages: 57

DOI identifier: 10.1038/s43246-024-00498-0

ISSN: 2662-4443