Wet-Oxidation-Assisted Chemical Mechanical Polishing and High-Temperature Thermal Annealing for Low-Loss 4H-SiC Integrated Photonic Devices

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Authors: Shi, Xiaodong; Lu, Yaoqin; Chaussende, Didier; Rottwitt, Karsten; Ou, Haiyan

Journal title: Materials; Volume 16; Issue 6; Pages: 2324

Journal number: 5

Journal publisher: MDPI Open Access Publishing

Published year: 2021

DOI identifier: 10.3390/ma16062324

ISSN: 1996-1944