Thermal oxidation assisted chemical mechanical polishing for low-loss 4H-SiC integrated photonic devices

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Authors: Xiaodong Shi; Weichen Fan; Ailun Yi; Xin Ou; Karsten Rottwitt; Haiyan Ou

Journal title: 47 th Micro and Nano Engineering Conference 2021 , Turin , Italy , 20/09/2021 - 23/09/2021 .

Journal number: 5

Journal publisher: DTU

Published year: 2021

DOI identifier: 10.5281/zenodo.6511444