The processing chain of the wide bandgap semiconductor SiC – How small steps enabled a mature technology

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Authors: Wellmann, Peter J.; Steiner, Johannes; Strüber, Sven; Arzig, Matthias; Salamon, Michael; Uhlmann, Norman; Nguyen, Binh Duong; Sandfeld, Stefan

Journal title: Diamond and related materials 136, 109895 - (2023). doi:10.1016/j.diamond.2023.109895

Journal number: 5

Journal publisher: Elsevier BV

Published year: 2023

DOI identifier: 10.1016/j.diamond.2023.109895

ISSN: 0925-9635