First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

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Authors: Helene Lhermet, Thierry Verdot, Audrey Berthelot, Brigitte Desloges, Frederic Souchon

Journal title: 2018 IEEE Micro Electro Mechanical Systems (MEMS)

Journal publisher: IEEE

Published year: 2018

Published pages: 249-252

DOI identifier: 10.1109/MEMSYS.2018.8346531

ISBN: 978-1-5386-4782-0