Structural and electrical properties of high-performance vanadium dioxide thin layers obtained by reactive magnetron sputtering

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Authors: Eduard-Nicolae Sirjita; Alexandre Boulle; Jean-Christophe Orlianges; Richard Mayet; Aurelian Crunteanu

Journal title: Thin solid films

Journal number: 759

Journal publisher: Elsevier

Published year: 2022

Published pages: 139461

DOI identifier: 10.1016/j.tsf.2022.139461

ISSN: 1879-2731