Pillar-structured 3D inlets fabricated by dose-modulated e-beam lithography and nanoimprinting for DNA analysis in passive, clogging-free, nanofluidic devices

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Authors: Franziska M Esmek; Tim Erichlandwehr; Nico Brkovic; Nathalie P Pranzner; Jeremy P Teuber; Irene Fernandez-Cuesta

Journal title: Nanotechnology

Journal number: 33, 38

Journal publisher: IOP Science

Published year: 2022

Published pages: 385301

DOI identifier: 10.1088/1361-6528/ac780d

ISSN: 1361-6528