Suspended Nanochannel Resonators Made by Nanoimprint and Gas Phase Deposition

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Authors: Manuel Müller, Jeremy Teuber, Rukan Nasri, Francesc Torres Canals, Núria Barniol, Jordi Sixto Llobet, Xavier Borrisé, Francesc Perez-Murano, Irene Fernandez-Cuesta

Journal title: IEEE 36th International Conference on Micro Electro Mechanical Systems

Journal number: -

Journal publisher: IEEE

Published year: 2023

Published pages: 1041-1044

DOI identifier: 10.1109/mems49605.2023.10052412

ISBN: 978-1-6654-9308-6