Fully Microelectromechanical Non-Volatile Memory Cell

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Authors: Worsey, Elliott; Tang, Qi; Kulsreshath, Mukesh Kumar; Pamunuwa, I D B

Journal title: Worsey , E , Tang , Q , Kulsreshath , M K & Pamunuwa , I D B 2023 , Fully Microelectromechanical Non-Volatile Memory Cell . in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 . Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , vol. 2023-January , Institute of Electrical and Electronics Engineers (IEEE) , pp. 507-510

Journal number: 1

Journal publisher: IEEE

Published year: 2023

DOI identifier: 10.1109/mems49605.2023.10052290