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Authors: Kleopatra Papamichou, Thomas Mechielsen, Aneta Stodólna, Erik Schuring, Henk Lensen
Journal title: SPIE Photomask Technology + EUV Lithography 2023
Journal number: Proceedings Volume PC12750
Journal publisher: SPIE Photomask Technology + EUV Lithography
Published year: 2023
DOI identifier: 10.1117/12.2686862
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