Comprehensive theoretical analysis of the period chirp in laser interference lithography

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Authors: Florian Bienert; Thomas Graf; Marwan Abdou Ahmed

Journal title: Applied Optics

Journal number: Vol 61 Issue 9

Journal publisher: Optica Publishing Group

Published year: 2022

Published pages: 2313-2326

DOI identifier: 10.1364/ao.451873

ISSN: 2155-3165