Optimization of Non-Alloyed Backside Ohmic Contacts to N-Face GaN for Fully Vertical GaN-on-Silicon-Based Power Devices

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Authors: Youssef Hamdaoui, Sofie S. T. Vandenbroucke, Sondre Michler, Katir Ziouche, Matthias M. Minjauw, Christophe Detavernier, Farid Medjdoub

Journal title: Micromachines

Journal number: 15

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2024

Published pages: 1157

DOI identifier: 10.3390/mi15091157

ISSN: 2072-666X