Investigation of atomic layer deposition methods of Al2O3 on <i>n</i>-GaN

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Authors: Liad Tadmor, Sofie S. T. Vandenbroucke, Eldad Bahat Treidel, Enrico Brusaterra, Paul Plate, Nicole Volkmer, Frank Brunner, Christophe Detavernier, Joachim Würfl, Oliver Hilt

Journal title: Journal of Applied Physics

Journal number: 135

Journal publisher: American Institute of Physics

Published year: 2024

DOI identifier: 10.1063/5.0189543

ISSN: 0021-8979