Unique features of FLEXion® tool for wide band gap and III–V semiconductor devices fabrication

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Authors: F. Torregrosa, G. Mathieu, G. Boccheciampe, S. Morata, B. Roux

Journal title: MRS Advances

Journal number: 7

Journal publisher: Springer Link

Published year: 2023

Published pages: 1499-1503

DOI identifier: 10.1557/s43580-022-00447-4

ISSN: 2059-8521