Laser-lift-off of GaN-based transistors with an ultra-short-pulsed deep UV laser

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Authors: Lutz Deriks, Eldad Bahat Treidel, Elisabeth Brandl, Julian Bravin, Enrico Brusaterra, Serhiy Danylyuk

Journal title: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX

Journal number: 32

Journal publisher: SPIE

Published year: 2024

Published pages: 12

DOI identifier: 10.1117/12.3001106