Hydrogenated Amorphous Silicon Carbide: A Low-Loss Deposited Dielectric for Microwave to Submillimeter-Wave Superconducting Circuits

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Authors: B.T. Buijtendorp; S. Vollebregt; K. Karatsu; D.J. Thoen; V. Murugesan; K. Kouwenhoven; S. Hähnle; J.J.A. Baselmans; A. Endo

Journal title: Physical Review Applied

Journal number: 18

Journal publisher: American Physical Society

Published year: 2022

DOI identifier: 10.48550/arxiv.2110.03500

ISSN: 2331-7019