Process Development and Characterization of Ru-based UBM for In Bumps Integration for Quantum Computing Applications

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Authors: Harold Le Tulzo, Diane Bijou, Thérèse Souza, Anthony Gallegos, Candice Thomas, Edouard Deschaseaux, Céline Feautrier, Jean Charbonnier, Alain Gueugnot, Jaber Derakhshandeh, Tassawar Hussain, Jérôme Daviot

Journal publisher: ECTC

Published year: 2024